helicon wave meaning in Chinese

螺旋波
螺旋形波

Hydrogenated amorphous silicon nitride ( a - sinx : h ) films have been deposited by helicon wave plasma enhanced chemical vapor deposition ( hwp - cvd ) , the effect of sih4 / n2 rate on the properties of the samples is systematically studied , and the critical experiment condition is obtained under which a - sinx : h films with different compositions are deposited
本工作采用螺旋波等离子体化学气相沉积( hwp - cvd )方法制备了氢化非晶氮化硅( a - sin _ x ： h )薄膜，系统地研究了不同反应气体配比对薄膜特性的影响，得到了沉积不同组分a - sin _ x ： h的典型实验条件。